A thermopneumatic micropump based on micro-engineering techniques
- 1 February 1990
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 21 (1-3) , 198-202
- https://doi.org/10.1016/0924-4247(90)85038-6
Abstract
No abstract availableKeywords
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- A piezoelectric micropump based on micromachining of siliconSensors and Actuators, 1988
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