A six-component silicon micro force sensor
- 15 March 1998
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 65 (2-3) , 109-115
- https://doi.org/10.1016/s0924-4247(97)01671-3
Abstract
No abstract availableThis publication has 2 references indexed in Scilit:
- Design of a ring-shaped three-axis micro force/torque sensorSensors and Actuators A: Physical, 1995
- A miniaturised force-torque sensor with six degrees of freedom for dental measurementsClinical Physics and Physiological Measurement, 1992