New Aspects of the Diluted Dynamic Clean Process

• 1 November 1998
• journal article
• Published by Trans Tech Publications, Ltd. in Solid State Phenomena
• Vol. 65-66, 19-22
• https://doi.org/10.4028/www.scientific.net/ssp.65-66.19

Abstract

Keywords

• CLEANING
• DDC
• GATE OXIDE
• ROUGHNESS IMPACT
• SILICON CONSUMPTION