A micromachined tunable CPW resonator
- 13 November 2002
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- Vol. 1 (0149645X) , 345-348
- https://doi.org/10.1109/mwsym.2001.966903
Abstract
This paper presents a novel tunable microwave resonator, consisting of a CPW spiral inductor with a cantilever interconnect structure. Tuning was achieved by applying a DC bias between the input and output of the resonator circuit. An observable resonance tuning between 3 and 7 GHz was accomplished by applying a bias from 0 to 40 V. Corresponding Q-factors between 17 and 20 were obtained in this tuning range.Keywords
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