Broad fullerene-ion beam generation and bombardment effects

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Abstract
We report the generation of a large, moderate current density beam of fullerenes from a Kaufman ion source, and initial results on the use of the beam for ion assisted deposition of MgF2 and for growth of hard amorphous carbon films. A 50–100 μA/cm2 beam of fullerenes approximately 3.0 cm in diameter was generated; singly and doubly ionized fullerenes were observed after passage through a mass analyzer, with little or no indication of breakdown of the fullerenes. The beam energy was varied over the range 100–700 eV, and continuous beam operation was maintained for approximately 30 min on an initial charge of 150 mg of fullerenes. Low friction, wear resistant coatings were generated from fullerene-ion bombardment of fullerene neutrals, and optical degradation of MgF2 films bombarded during growth was observed.