An Acoustic Microscope for Subsurface Defect Characterization
- 1 March 1985
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Sonics and Ultrasonics
- Vol. 32 (2) , 325-331
- https://doi.org/10.1109/t-su.1985.31599
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- Integrated Circuit Inspection Via Acoustic MicroscopyIEEE Transactions on Sonics and Ultrasonics, 1983
- Observation of surface cracks with scanning acoustic microscopeJournal of Applied Physics, 1982
- Anisotropy detection in sapphire by acoustic microscope using line-focus beamElectronics Letters, 1981
- Acoustic microscopy with mechanical scanning—A reviewProceedings of the IEEE, 1979
- Visualization of solid material joints using a transmission-type scanning acoustic microscopeApplied Physics Letters, 1977