Micromachined thin film bulk acoustic resonators
- 17 December 2002
- proceedings article
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- p. 135-138
- https://doi.org/10.1109/freq.1994.398344
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- High-Q microwave acoustic resonators and filtersIEEE Transactions on Microwave Theory and Techniques, 1993