Kinetics of interlayer growth and changes in residual elastic strain during annealing of Mo/Si multilayers
- 31 December 1993
- journal article
- Published by Elsevier in Nanostructured Materials
- Vol. 3 (1-6) , 195-202
- https://doi.org/10.1016/0965-9773(93)90079-q
Abstract
No abstract availableKeywords
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