Water based I-line projection lithography of PEDOT

• 4 April 2003
• journal article
• Published by Elsevier in Synthetic Metals
• Vol. 135-136, 53-54
• https://doi.org/10.1016/s0379-6779(02)00656-2

Abstract

Keywords

• WATER BASED
• LITHOGRAPHY OF PEDOT
• BASED I LINE
• LINE PROJECTION LITHOGRAPHY