Atomic Structure of Si Surfaces Etched in Triton/NaOH Solutions

• 1 June 1995
• journal article
• Published by American Chemical Society (ACS) in The Journal of Physical Chemistry
• Vol. 99  (23) , 9472-9478
• https://doi.org/10.1021/j100023a026

Abstract

Keywords

• ETCHING
• ATOMIC
• SOLUTIONS
• STRUCTURE
• RESOLUTION
• SI SURFACES
• TRITON MOLECULES