Compact, Thermally-Tuned Resonant Ring Muxes in CMOS with Integrated Backside Pyramidal Etch Pit

1 January 2011

proceedings article
Published by Optica Publishing Group

p. OMV3
https://doi.org/10.1364/ofc.2011.omv3

Abstract

We present add-drop filters manufactured as ring resonators in commercial 130 nm SOI CMOS technology with thermal tuning. Their thermal impedance has been increased by removal of the substrate resulting in >12x increase in tuning efficiency.

Keywords

CMOS TECHNOLOGY
COMPLEMENTARY METAL OXIDE SEMICONDUCTORS
RING RESONATORS
SILICON ON INSULATOR

This publication has 2 references indexed in Scilit:

Highly-efficient thermally-tuned resonant optical filters
Optics Express, 2010
Computer Systems Based on Silicon Photonic Interconnects
Proceedings of the IEEE, 2009