Emission characterization of diamond-coated Si field emission arrays

• 1 March 1997
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
• Vol. 15  (2) , 446-449
• https://doi.org/10.1116/1.589595

Abstract

Keywords

• EMISSION CHARACTERIZATION
• EMISSION ARRAYS
• COATED SI
• SI FIELD
• DIAMOND COATED
• FIELD EMISSION