Yield Projection Based on Electrical Fault Distribution and Critical Structure Analysis
- 1 January 1989
- book chapter
- Published by Springer Nature
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
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- Role of defect size distribution in yield modelingIEEE Transactions on Electron Devices, 1985
- Modeling of defects in integrated circuit photolithographic patternsIBM Journal of Research and Development, 1984
- Integrated circuit yield statisticsProceedings of the IEEE, 1983
- LSI Yield Modeling and Process MonitoringIBM Journal of Research and Development, 1976