Reduction of outgassing from stainless‐steel surfaces by glow discharge cleaning

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Abstract
The effect of glow dischargecleaning in argon gas with a glow‐mode plasma source on outgassing from stainless steel has been studied experimentally by the measurements of thermal desorption spectra (TDS) and outgassing rates. An outgassing rate of 2.7×10−9 Pa m3/m2 s is obtained after dischargecleaning for 5 h measured by the throughput method. The desorption energy of the H2O and CO+N2, which can be removed by glow dischargecleaning even if the anode voltage is <20 V, has been measured by means of TDS, and was found to extend up to <3 eV. The trapping of Ar and H2 on the surface during glow dischargecleaning, and reemission of those molecules from the surface after glow dischargecleaning were also found by TDS.

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