Microfabricated Quadrupole Ion Trap for Mass Spectrometer Applications
- 31 March 2006
- journal article
- Published by American Physical Society (APS) in Physical Review Letters
- Vol. 96 (12) , 120801
- https://doi.org/10.1103/physrevlett.96.120801
Abstract
An array of miniaturized cylindrical quadrupole ion traps, with a radius of 20 microm, is fabricated using silicon micromachining using phosphorus doped polysilicon and silicon dioxide for the purpose of creating a mass spectrometer on a chip. We have operated the array for mass-selective ion ejection and mass analysis using Xe ions at a pressure of 10(-4). The scaling rules for the ion trap in relation to operating pressure, voltage, and frequency are examined.Keywords
This publication has 12 references indexed in Scilit:
- Trapping and separating polar molecules by a hexapole trapApplied Physics Letters, 2005
- Towards the hand-held mass spectrometer: design considerations, simulation, and fabrication of micrometer-scaled cylindrical ion trapsInternational Journal of Mass Spectrometry, 2004
- High‐pressure ion trap mass spectrometryRapid Communications in Mass Spectrometry, 2004
- Double resonance ejection in a micro ion trap mass spectrometerRapid Communications in Mass Spectrometry, 2002
- A Quadrupole Ion Trap with Cylindrical Geometry Operated in the Mass-Selective Instability ModeAnalytical Chemistry, 1998
- High-pressure effects in miniature arrays of quadrupole analyzers for residual gas analysis from 10−9 to 10−2 TorrJournal of Vacuum Science & Technology A, 1996
- Planar ion microtrapsPhysical Review A, 1992
- Theory of high-resolution mass spectrometry achieved via resonance ejection in the quadrupole ion trapAnalytical Chemistry, 1992
- Electromagnetic traps for charged and neutral particlesReviews of Modern Physics, 1990
- Radiofrequency Spectroscopy of Stored Ions I: StoragePublished by Elsevier ,1968