Abstract
The distribution of the interstitial-vacancy (I–V) pairs produced in such a substance as germanium by successive knock-on is discussed. Calculation of the distribution is performed basing on the formula proposed by Bohr and Seitz and Koehler and applying the Monte-Carlo Method. Ratio of the close I–V pairs to the total I–V pairs produced by an 10 4 eV first knocked-on atom is about 60%. Taking into account the replacement collision, decrease of about 40% in the total number of the I–V pairs is obtained and the ratio becomes 30%. The decrease in the total number reduces the difference between the total number deduced from calculation and that obtained by experiment. The following results are also obtained. The interstitials and vacancies are distributed in several groups. They exist in the region enveloped by a sphere of about from 50 to 100 atomic distances of diameter. There is no tendency that the concentrated damaged region spreads in the incident direction of the first knocked-on atom and that the interstitials distribute in the outer part of the concentrated damaged region.