High Tc Yb-Ba-Cu-O Thin Films Deposited on Sintered YSZ Substrates by Sputtering

Abstract
Thin films of superconductors Yb-Ba-Cu-O were prepared by 50 Hz ac sputtering technique. The critical temperatures for onset and zero resistivity were 93 K and 66 K, respectively. The metal compositions and crystal structures of the films were controlled by varying such preparation conditions as sputtering gas, target composition, and substrate temperature and their relations with superconductivity were investigated.

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