DAMAGE DEPTH DISTRIBUTION OF 15-keV Kr IMPLANTED IN RbCl AS OBTAINED FROM DIFFUSION MEASUREMENTS
- 15 April 1971
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 18 (8) , 335-337
- https://doi.org/10.1063/1.1653686
Abstract
The steady‐state trapping model for inert‐gas diffusion in alkali halides is used to obtain direct experimental information on the damage depth distribution resulting from 15‐keV Kr bombardment of RbCl. The average damage concentration falls to 5% at about 350 Å (in rough agreement with random stopping theory) but does not reach 1% until about 650 Å (suggesting that channeled stopping also plays a role). Beyond 1200 Å the implanted damage merges with the background concentration of traps. The traps are shown to be single vacancies by comparing diffusion and conductivity measurements for pure and doped specimens.Keywords
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