The thickness profiles of layers grown by electroepitaxy (current‐controlled liquid phase epitaxy) were investigated in conjunction with experimental growth parameters. It was found that defective electrical contacts to the substrate and variations in the dissolution depth of the substrate by the gallium contact layer lead to random fluctuations in the epitaxial layers. Convective flow in the solution due to horizontal gradients in the solution caused by joule heating leads to systematic variations in the thickness of the epilayers. Experimental procedures are presented for minimizing or essentially eliminating both types of thickness variations.