Sputtering Mass Spectrometer with Cesium Primay Ion Source

• 1 January 1972
• journal article
• Published by The Mass Spectrometry Society of Japan in Journal of the Mass Spectrometry Society of Japan
• Vol. 20  (3) , 185-195
• https://doi.org/10.5702/massspec1953.20.185

Abstract

Keywords

• SPUTTERING MASS
• CESIUM PRIMAY
• PRIMAY ION
• MASS SPECTROMETER
• ION SOURCE