Hydrogen plasma etching of CdTe
- 1 December 1986
- journal article
- Published by Springer Nature in Journal of Materials Science Letters
- Vol. 5 (12) , 1319-1320
- https://doi.org/10.1007/bf01729405
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Hydrogen plasma etching of semiconductors and their oxidesJournal of Vacuum Science and Technology, 1982
- Hydrogen plasma etching of GaAs oxideApplied Physics Letters, 1981