The Hydrogen Content and Properties of SiO2 Films Deposited from Tetraethoxysilane at 27 MHz in Various Gas Mixtures
- 1 July 1991
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 138 (7) , 2042-2046
- https://doi.org/10.1149/1.2085920
Abstract
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