A practical excimer laser-based cleaning tool for removal of surface contaminants
- 1 January 1994
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Components, Packaging, and Manufacturing Technology: Part A
- Vol. 17 (4) , 631-643
- https://doi.org/10.1109/95.335050
Abstract
No abstract availableKeywords
This publication has 37 references indexed in Scilit:
- Optical and acoustic study of nucleation and growth of bubbles at a liquid-solid interface induced by nanosecond-pulsed-laser heatingApplied Physics A, 1994
- Shock wave analysis of laser assisted particle removalJournal of Applied Physics, 1993
- Photodeflection probing of the explosion of a liquid film in contact with a solid heated by pulsed excimer laser irradiationJournal of Applied Physics, 1993
- Optical reflectance and scattering studies of nucleation and growth of bubbles at a liquid-solid interface induced by pulsed laser heatingPhysical Review Letters, 1993
- Excimer laser-A reliable tool for microprocessing and surface treatmentAIP Conference Proceedings, 1993
- Transmission studies of explosive vaporization of a transparent liquid film on an opaque solid surface induced by excimer-laser-pulsed irradiationJournal of Applied Physics, 1992
- Excimer laser ablation of polyimide in a manufacturing facilityApplied Physics A, 1992
- Noncontact monitoring of laser ablation using a miniature piezoelectric probe to detect photoacoustic pulses in airApplied Physics Letters, 1992
- Laser sputteringNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1985
- Effect of water and paint coatings on the magnitude of laser-generated shocksOptics Communications, 1976