Spectroscopy of the anharmonic cantilever oscillations in tapping-mode atomic-force microscopy

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Abstract
By spectroscopic analysis of the cantilever oscillation in tapping-mode atomic-force microscopy (TM–AFM), we demonstrate that the transition from an oscillatory state dominated by a net attractive force to the state dominated by repulsive interaction is accompanied by the enhanced generation of higher harmonics. The higher harmonics are a consequence of the nonlinear interaction and are amplified to significant amplitudes by the eigenmodes of the cantilever. The results show that in a quantitative description of TM–AFM higher eigenmode excitation must be considered to account for internal energy dissipation.