Partial Least-Squares Calibration Diagnostics Applied To The FT-IR Analysis Of Borophosphosilicate Glass (BPSG) Thin Films*
- 1 December 1989
- proceedings article
- Published by SPIE-Intl Soc Optical Eng
- Vol. 1145, 425-426
- https://doi.org/10.1117/12.969531
Abstract
Full-spectrum multivariate calibration methods are capable of providing a multitude of diagnostic capabilities for evaluating the quality of the calibration, identifying problem calibration samples, and flagging unknown samples whose analysis by these methods might be unreliable. These diagnostics are demonstrated for the analysis of BPSG thin films on silicon using infrared spectroscopy and partial least-squares methods.© (1989) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.Keywords
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