A production polishing process for thin PLZT wafers
- 1 January 1980
- journal article
- plzt goggles
- Published by Taylor & Francis in Ferroelectrics
- Vol. 27 (1) , 187-190
- https://doi.org/10.1080/00150198008226096
Abstract
Thin PLZT ceramic wafers cannot be polished in a production setting by conventional methods. Due to the polycrystalline nature of ceramics and the softness of this material, suitable slurry/polishing pad combinations were required. The unusually large diameter-to-thickness ratio of the slice (approximately 150 to 1) required that a special blocking technique be developed.Keywords
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