An Apparatus for Study of Secondary Ions from Ion Bombardment of a Metal Surface
- 1 May 1973
- journal article
- research article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 44 (5) , 605-610
- https://doi.org/10.1063/1.1686194
Abstract
An apparatus for the study of secondary positive and negative ions from metal surfaces under positive ion bombardment has been constructed in stainless steel using ultra‐high vacuum technology. It provides for triple mass analysis (i.e., of primary and both secondary beams), and energy analysis of the secondary ions. A retarding technique suitable for wide energy distributions has been developed. Some preliminary results obtained are given.Keywords
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