Optimization of the geometry of gas-sensitive interdigital capacitors

• 1 May 1991
• journal article
• Published by Elsevier in Sensors and Actuators B: Chemical
• Vol. 4  (1-2) , 95-98
• https://doi.org/10.1016/0925-4005(91)80182-j

Abstract

Keywords

• OPTIMIZATION
• SENSORS
• DIELECTRIC
• SO2
• PLANAR
• VPM
• INTERDIGITAL CAPACITORS