Protrusion Formation on Metal Targets during Co-Sputtering
- 1 October 1972
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 11 (10)
- https://doi.org/10.1143/jjap.11.1581
Abstract
No abstract availableThis publication has 2 references indexed in Scilit:
- Cone Formation on Metal Targets during SputteringJournal of Applied Physics, 1971
- Microtopography of surfaces eroded by ion-bombardmentJournal of Materials Science, 1969