Development of the Inverted Sputter Source
- 1 April 1976
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Nuclear Science
- Vol. 23 (2) , 1109-1112
- https://doi.org/10.1109/tns.1976.4328415
Abstract
A sputter source is described in which the beam is extracted through the ionizer. This gives a very compact source with easily changed cones. The beam transmissions through an electrostatic accelerator are good and life times of in excess of a month between services are normal.Keywords
This publication has 2 references indexed in Scilit:
- The inverted sputter sourceNuclear Instruments and Methods, 1975
- A close to universal negative ion sourceNuclear Instruments and Methods, 1974