A new thin-film humidity and thermal micro-sensor with Al/SrNbxTi1−xO3/SiO2/Si structure
- 1 May 1999
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 75 (1) , 70-74
- https://doi.org/10.1016/s0924-4247(99)00052-7
Abstract
No abstract availableKeywords
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