Excitation and detection of vibrations of micromechanical structures using a dielectric thin film
- 3 May 1989
- journal article
- Published by Elsevier in Sensors and Actuators
- Vol. 17 (1-2) , 219-223
- https://doi.org/10.1016/0250-6874(89)80083-6
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- Etched silicon vibrating sensorJournal of Physics E: Scientific Instruments, 1984