Etching of polycrystalline diamond and amorphous carbon films by RIE
- 25 March 1992
- journal article
- Published by Elsevier in Diamond and Related Materials
- Vol. 1 (2-4) , 277-280
- https://doi.org/10.1016/0925-9635(92)90039-q
Abstract
No abstract availableThis publication has 2 references indexed in Scilit:
- Etching and deposition phenomena in an R.F. CH4 plasmaThin Solid Films, 1987
- Ion-beam-assisted etching of diamondJournal of Vacuum Science & Technology B, 1985