Electrostatic force microscope imaging analyzed by the surface charge method

• 1 September 1993
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
• Vol. 11  (5) , 1774-1781
• https://doi.org/10.1116/1.586477

Abstract

Keywords

• ELECTROSTATIC FORCE