Abstract
InGaAs JFETs were made by LPE growth of the n-channel and zinc diffusion from spin-on films at low temperatures for the p+-gate. Extrinsic transconductances in excess of 100 mS/mm for gate lengths of 1.2 μm and frequency limits (MAG = 1) above 30 GHz were obtained. The good agreement between experimentally determined data and those calculated from material parameters and device dimensions indicates that a low temperature and/or short time process for gate formation is a necessary prerequisite in InGaAs JFET technology.

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