ESR Centers in Fused Quartz Exposed to Glow-Discharge Plasmas of Ar and H2

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Abstract
Fused quartz was exposed to glow-discharge plasmas of Ar and H2 gases. The ESR centers, E', and the impurity-associated hyperfine structure (HF) centers were found in the uncovered quartz as well as in the quartz covered with a glass-plate having an absorption-edge E e of 150 nm which prevented direct exposure to the plasmas. However, these centers were not found in the quartz covered with a glass-plate having an E e of 220 nm. Both centers are created predominantly by UV-light of wavelengths between 150 and 220 nm radiated from the plasmas rather than by the plasma particles. It is suggested than the heating effect by the plasma particles on the directly exposed surface enhances the creation of the HF center.