Nano-Structure Ge Formed in Thin Film SiO₂ Using Ion Implantation

Publisher Website

1 January 1993

journal article
Published by Springer Nature in MRS Proceedings

Vol. 316
https://doi.org/10.1557/proc-316-475

Abstract

No abstract available

Keywords

This publication has 5 references indexed in Scilit:

Photoluminescence of Si-Rich SiO₂ Films: Si Clusters as Luminescent Centers
Japanese Journal of Applied Physics, 1993
Hydrogenated Si clusters: Band formation with increasing size
Physical Review B, 1992
Visible Photoluminescence from Si Microcrystals Embedded in SiO₂ Glass Films
Japanese Journal of Applied Physics, 1992
Visible photoluminescence of Ge microcrystals embedded in SiO2 glassy matrices
Applied Physics Letters, 1991
Quantum Size Effects in Ge Microcrystals Embedded in SiO₂ Thin Films
Japanese Journal of Applied Physics, 1989