Fractal capacitors
- 1 January 1998
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Journal of Solid-State Circuits
- Vol. 33 (12) , 2035-2041
- https://doi.org/10.1109/4.735545
Abstract
A linear capacitor structure using fractal geometriesis described. This capacitor exploits both lateral and verticalelectric fields to increase the capacitance per unit area. Comparedto standard parallel-plate capacitors, the parasitic bottomplatecapacitance is reduced. Unlike conventional metal-to-metalcapacitors, the capacitance density increases with technologyscaling. A classic fractal structure is implemented with 0.6-mmetal spacing, and a factor of 2.3 increase in the capacitance...Keywords
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