Broadening of Spectral Response Width by a-Si/a-SiGe p-i-n type Solar Cells

Publisher Website
Google Scholar
Abstract
We report the MIS type a-Si:H solar cells, plasma analysis using quadrupole mass analyzer and tandem type solar cell which improved spectral response in the long wavelength region. MIS type a-Si:H solar cells inserting TiO x layer as an insulator show the conversion efficiency of 4.4%. The improvement of the collection efficiency in the short wavelength region were accomplished by decrease in interface state density with addition of TiO x film. Plasma polymerized species, (SiH m +)2, increased with the rf power up to 40–50 W and decreased as a result of the decomposition to (SiH m +) species, but in the case of GeH4 reaction, (GeH m +)2 species decreased monotonously with rf power. Suitable condition of a-SiGe:H films deposition are related to the behavior of the polymerization and decomposition of SiH4 and GeH4 gases, and high quality films are obtained at relatively low rf power condition before (GeH m +)2 decomposition. Tandem type amorphous solar cell shows 3.2% coversion efficiency and the collection efficiency in the long wavelength region are clearly improved.

This publication has 0 references indexed in Scilit: