The electron-energy distribution function in a shielded argon radiofrequency inductive discharge
- 1 August 1995
- journal article
- Published by IOP Publishing in Plasma Sources Science and Technology
- Vol. 4 (3) , 332-336
- https://doi.org/10.1088/0963-0252/4/3/002
Abstract
The electron-energy distribution function (EEDF) and its integrals such as plasma density and effective electron temperature have been measured in an inductively coupled plasma. The EEDFs were measured together with electrical discharge characteristics over a wide range of argon gas pressure between 1 mTorr and 1 Torr. The discharge was maintained by an internal induction coil, which was electrostatically shielded to provide a purely inductive discharge. All measurements were related to RF power dissipated in the plasma. Non-Maxwellian EEDFs were found that differ significantly from those found in capacitive RF discharges and in inductive discharges without or with only partial electrostatic shielding.Keywords
This publication has 13 references indexed in Scilit:
- Electron-density and energy distributions in a planar inductively coupled dischargeJournal of Applied Physics, 1994
- Spatial variation of the electron distribution function in a rf inductively coupled plasma: Experimental and theoretical studyJournal of Applied Physics, 1994
- Electrical characteristics and electron heating mechanism of an inductively coupled argon dischargePlasma Sources Science and Technology, 1994
- Paradoxical spatial distribution of the electron temperature in a low pressure rf dischargeApplied Physics Letters, 1993
- A simple analysis of an inductive RF dischargePlasma Sources Science and Technology, 1992
- Measurement of electron energy distribution in low-pressure RF dischargesPlasma Sources Science and Technology, 1992
- Modelling of inductively coupled discharges with internal and external coilsPlasma Sources Science and Technology, 1992
- Electrical characteristics of parallel-plate RF discharges in argonIEEE Transactions on Plasma Science, 1991
- Probe measurements of the space potential in a radio frequency dischargeJournal of Applied Physics, 1990
- I n s i t u simultaneous radio frequency discharge power measurementsJournal of Vacuum Science & Technology A, 1990