Light-Weight and Large-Area Solar Cell Production Technology

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Abstract
Production technologies for light-weight, large-area and flexible solar cells are reviewed. Roll-to-roll processes including an originally developed stepping-roll deposition process are used to fabricate large-area hydrogenated amorphous silicon-based solar cells in succession on plastic film substrates. A unique monolithic device structure for the insulating film substrates having through-hole contacts was developed and applied to simplify the production processes and to generate high voltage using connection in series. Newly developed deposition methods of (1) plasma excitation frequency controlled chemical vapor deposition, (2) low substrate temperature selective reactive sputtering, and (3) large-area uniform transparent conductive oxide film deposition are reviewed. Finally, our recently developed 4 m-long, light-weight, large-area building-integrated modules are introduced.

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