X-ray photoelectron spectroscopy of sputtered platinum thin films containing large amounts of carbon

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Abstract
Polycrystalline thin films of platinum containing amounts of carbon up to 17 at.% have been prepared by dc reactive sputtering. Although bulk properties were also investigated, emphasis is given here to the surface study of these films by x-ray photoelectron spectroscopy. The Pt and C core level intensities, the Pt 4f asymmetry, and the valence band spectra are consistent with the existence of a surface phase of the type Pt-Cx.

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