Optical monitoring for rate and uniformity control of low power plasma-enhanced CVD
- 1 October 1983
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B
- Vol. 1 (4) , 943-946
- https://doi.org/10.1116/1.582716
Abstract
No abstract availableThis publication has 0 references indexed in Scilit: