Chemical Etching of Silicon Carbide with Hydrogen

• 1 January 1965
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 112  (9) , 955-956
• https://doi.org/10.1149/1.2423742

Abstract

Keywords

• ELECTROCHEMICAL ANALYSIS
• ELECTROCHEMICAL ELECTRODES
• ETCHING
• SILICON COMPOUNDS
• CHLORINE COMPOUNDS