Use of a magnetic spectrometer to profile light elements by elastic recoil detection
- 1 April 1986
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 15 (1-6) , 481-485
- https://doi.org/10.1016/0168-583x(86)90347-2
Abstract
No abstract availableKeywords
This publication has 7 references indexed in Scilit:
- Compositions of metals implanted to very high fluencesVacuum, 1984
- A method for analysis and profiling of boron, carbon and oxygen impurities in semiconductor wafers by recoil atoms in heavy ion beamsNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1984
- Simultaneous high depth resolution profiling of carbon and oxygenNuclear Instruments and Methods in Physics Research, 1983
- Nuclear and Materials Studies with Ion BeamsIEEE Transactions on Nuclear Science, 1983
- High depth resolution for profiling carbon by the reactionNuclear Instruments and Methods in Physics Research, 1981
- Technique for profiling 1H with 2.5-MeV Van de Graaff acceleratorsApplied Physics Letters, 1979
- The use of 6Li and 35Cl ion beams in surface analysisNuclear Instruments and Methods, 1978