Atomic force microscopy for high speed imaging using cantilevers with an integrated actuator and sensor

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Abstract
A cantilever with an integrated ZnO piezoelectric actuator in feedback with a piezoresistive sensor is utilized in an atomic force microscope (AFM) to achieve a new high speed imaging technique. The imaging bandwidth is increased from 0.6 to 6 kHz by bending the cantilever over sample topography with the actuator rather than moving the sample with a 2 in. piezotube. Images taken in the constant force mode with a 3 mm/s tip velocity of a sample containing 2 μm vertical steps are presented. The effects of electrical coupling from the actuator were eliminated by measuring the piezoresistor sensor with a lock‐in amplifier.

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