Effective methods to prevent stiction during post-release-etch processing
- 24 August 2005
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
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- A Berthelot-Bourdon tube method for studying water under tensionJournal of Physics E: Scientific Instruments, 1980