Single-source organometallic chemical vapour deposition process for sulphide thin films: Introduction of a new organometallic precursor BunIn(SPri)2 and preparation of In2S3 thin films
- 1 March 1991
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 198 (1-2) , 339-345
- https://doi.org/10.1016/0040-6090(91)90351-w
Abstract
No abstract availableKeywords
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