Characterization of filtered cathodic vacuum arc system
- 31 October 1997
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 94-95, 195-200
- https://doi.org/10.1016/s0257-8972(97)00347-2
Abstract
No abstract availableKeywords
This publication has 8 references indexed in Scilit:
- Properties of carbon ion deposited tetrahedral amorphous carbon films as a function of ion energyJournal of Applied Physics, 1996
- Simulation of plasma flow in toroidal solenoid filtersIEEE Transactions on Plasma Science, 1996
- Photoresponse characteristics of n-type tetrahedral amorphous carbon/p-type Si heterojunction diodesApplied Physics Letters, 1994
- Properties of filtered-ion-beam-deposited diamondlike carbon as a function of ion energyPhysical Review B, 1993
- Optical and electronic properties of amorphous diamondDiamond and Related Materials, 1993
- Deposition of TiN, TiC, and TiO2 films by filtered arc evaporationSurface and Coatings Technology, 1991
- Properties of tetrahedral amorphous carbon prepared by vacuum arc depositionDiamond and Related Materials, 1991
- Structure and hardness of diamond-like carbon films prepared by arc evaporationJournal of Materials Science Letters, 1988