Monte Carlo Simulation of Backscattered and Secondary Electron Profiles

Publisher Website

1 January 1992

book chapter
Published by Springer Nature

p. 125-129
https://doi.org/10.1007/978-3-7091-6679-6_10

Abstract

No abstract available

Keywords

This publication has 2 references indexed in Scilit:

Signal of backscattered electrons at edges and surface steps in dependence on surface tilt and take-off direction
Scanning, 1986
A simple Monte Carlo simulation of the electron-target interaction on the basis of an empirical scattering formula
Ultramicroscopy, 1984